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横式扩散炉
Horizontal
Furnaces
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应用领域:
IC fab, Solar
Cell
设备特性:
Horizontal diffusion furnaces, excellent CoO.
·提供各种扩散炉: Atmospheric, LPCVD, PECVD, 4” to 12” wafers.
·可配置多达4层炉管. 每层独立控制. 整机结构紧奏.
·自动控制, 自动工艺, 多种功能选择
·优秀的性价比, excellent cost of ownership. |
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| 太阳能电池干法制绒
Solar Cell Dry Texuring |
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应用领域:
Solar cell.
设备特性: Microwave plasma texturing
of solar cell surfaces.
·High efficiency microwave plasma processes.
·Improve cell efficiency.
·Reduce wafer breakage. Improve process reliability.
·Pilot or High volume production, up to 3,000 WPH.
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| 薄膜光伏激光工艺 Thin Film PV Laser Processing |
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应用领域: Thin Film Photovoltaic PV, TFPV.
设备特性:Complete laser processing system for a-Si, CIGS, CIS, CdTe thin film PV.
·P1 front contact TCO such as ITO, IZO, SnO2 and ZnO2.
·P2 active layer, a-Si, CdTe, CIGS, CIS.
·P3 back contact metals such as Al, Mo, Au.
·Best in the industry! .
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| 太阳能电池专用扩散炉 Diffusion Furnaces for Solar Cell |
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应用领域: Solar cell manufacturing and pilot lines.
设备特性:POCl3 furnaces 用于PV电池生产和研发.
·Up to 156mm x 156mm solar substrates. Over 40” flat zone.
·Automatic cantilever substrate loading.
·Advanced controller and user-friendly interface.
·POCl3 processes is provided. |
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| 等离子边缘隔离
Solar
Cell Edge Isolation |
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应用领域:
Solar Cell Edge Isolation.
设备特性: 等离子刻蚀法 Edge Isolation.
·RF plasma etch for edge isolation.
·Up to 300 wafers per run.
·Cage electrode, minimum plasma damage.
·High efficiency, low cost. |
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| 扩散炉自动装卸 Furnaces Boat Auto Loaders |
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应用领域: Solar cell, mono-crystal and multi-crystal silicon.
设备特性: Automatically load and unload solar wafer boats.
·Highly reliable and easy to operate.
·For POCl3 furnaces, PECVD furnaces, and diffusion furnaces.
·Easy to integrate with many furnace models from different manufacturers.
·Customized for your specific boat designs. |
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| 四探针测试仪 Four Point Probes |
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应用领域: Solar cell, mono-crystal and multi-crystal silicon.
设备特性: Four Dimensions 四探针广泛用于全球太阳能行业。
·产品质量高, 使用方便, 功能强, 行业公认。
·测 PCOl3 Diffusion, 方块电阻.
·Up to 156 x 156 mm2 size。Mapping.
·精度高, 测量范围极广. Sheet resistance 可达 1E-3 to 8E+11 ohm/sq. |
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| P-N结漏电流检测 P-N Junction Leakage Test |
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应用领域: Solar cell, IC fab.
设备特性: Four Dimensions (4D) Mo280, 具有漏电流检测功能的四探针.
·4D独有的最新技术: P-N结漏电流检测.
·Junction Conductivity from 10 -9 Siemens/cm2 to10 -2 Siemens/cm2.
·Mo280具有全球PV业享有盛誉的280的所有功能.
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| ECV 掺杂浓度检测
ECV Dopant Profiling |
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应用领域:
Solar
cell.
设备特性:
WEP is a world leader in ECV dopant profiling.
·Electrochemical CV profiling - 电解液CV (ECV)法检测掺杂-深度曲线.
·ECV 测量活性杂质, 直观简易, 优于 SIMS and SRP.
·ECV 广泛用于各种半导体工艺, Group IV (Si, Ge, SiC), Group
II/VI (GaAs, InP …), Group II/VII (CdTe, HgCdTe,
ZnO …), Nitrides (GaN, AlGaN …), 及其它化合物半导体 (AlGaAs,
GaInP, AlGaInP …) |
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| 太阳能电池光谱反应
Spectral
Response, QE |
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应用领域:
Solar cell.
设备特性: 灵敏度高, 选项众多, 性能可靠. 符合IEC60904-8
标准.
·检测太阳能电池的光谱反应.
·独立检测设备, 或是和Solar Tester 结合使用.
·单色光可由光谱仪或是过滤片产生. 光谱范围可达300-1200nm.
·可具有IQE和EQE检测能力. |
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| 太阳能电池测试仪
Solar
Cell Tester |
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应用领域:
Solar cell.
设备特性: 灵敏度高, 选项众多,
性能可靠.
·检测电池的效率以及各项参数指标. Cell efficiency, light and dark
I-V curves,Isc, Voc, Imax, Vmax,Pmax, FF, Rsh, and
Rs.
·生产检测型(IEC60904-9 Class B标准)和研究开发型(IEC60904-9 Class
A).
·可有 Spectral Response, Light Simulator Spectrometer
等options. |
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| 太阳能电池组件测试仪
Solar
Module Tester |
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应用领域: Solar
cell.
设备特性: 灵敏度高, 选项众多, 性能可靠.
·检测电池组件的效率以及各项参数指标.
·生产检测型(IEC60904-9 Class B标准)和研究开发型(IEC60904-9 Class
A).
·Simulator 可有Xenon pulsed illumination 或single flash.
·Standard AM1.5 Global, or AM1.0, 2.0 options. |
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金属膜厚检测
成份分析
XRF Metal Film Thickness and Composition |
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应用领域:
Thin
Film Solar Cell.
设备特性:
XRF 检测金属膜厚及成份分析.
·IC process, B, P doping level, metal film thickness
and composition.
·Thin file solar cell, CIGS, CdTe, and more.
·Wafer size, large penal, or small piece.
·Powerful and flexible. |
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| 椭偏仪
Ellipsometer |
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应用领域:
Solar
cell.
设备特性:
Gaertner 精密光学仪器具有一百多年的历史, 它的 ellipsometers 享誉全球.
有激光椭偏仪和光谱椭偏仪.
·用于精密检测各种薄膜的厚度, 包括oxide, nitride, metal oxide, ITO.
·采用四极偏振器, 无转动器件, 稳定性强, 准确率高.
·膜厚范围可自0nm 到6000nm. 可具有达12”直径自动 mapping 功能. |
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光谱薄膜测试仪
Spectro-Refelctometer
for Thin Film Measurement |
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应用领域:
Solar cell.
设备特性:
Angstrom Sun 光谱反射仪广泛用于各种透明、半透明薄膜测试.
·用于检测各种薄膜的厚度, 包括oxide, nitride, photo resist, metal
oxide, ITO.
·膜厚范围可自10 nm to 50 ?m. 可选各种光谱范围, 自UV 200nm到IR 1700nm,
以满足各类材料检测的需要.
·可具有高达12”直径自动 mapping 功能. 可检测多达5层薄膜. |
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| 晶圆几何特性检测
Wafer
Measurement Systems |
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应用领域:
Wafer manufacturing
(Si, GaAs等), IC fab, solar cell, MEMS, photonics.
设备特性:
晶圆几何特性检测设备包括从手动到全自动的系列产品.
·检测几何参数包括：Thickness, TTV, Bow, Warp, and Flatness.
·采用独特的Push/Pull电容传感测试技术,可测试GaAs、SiC、Si等半导材料.
·对普通电容传感式设备无法监测的高阻率材料,该设备都能监测.
·产品以 ASTM Specifications 为标准. |
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| 电池和组件缺陷视测 Cell & Module Vision Inspection |
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应用领域: 硅电池与组件, 薄膜组件.
设备特性: Inline or off line, fast, high resolution inspection.
·Detects cracks, scratches, holes, particles, residues
·100% inline inspection at multiple steps.
·Inline inspection rate in cycle time of the line.
·Defects classification and statistical evaluation |
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