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机械微孔钻台
Mechanical Micro
Drilling |
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应用领域:
MEMS, photonics, nano
technologies, 电子器件, 医疗器件, 航空航天等精密加工.
设备特性:
Cameron 公司的机械微孔钻台广泛应用于各种材料和器件的精密加工.
Cameron 是一家具有40多年历史的美国公司. 产品优质可靠, 性价极优.
·微孔直径小达 0.050 mm (50 um).
·Spindle speed 达 30,000 RPM.
·Key-type or key-less chuck.
·Depth gage, X-Y table, tilting base,
precision alignment, camera, and many
other options are available. |
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机械微加工平台
CNC
Micro Machining |
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应用领域:
MEMS, photonics, nano
technologies, 电子器件, 医疗器件, 航空航天等精密加工.
设备特性:
Cameron 公司的机械微孔钻台广泛应用于各种材料和器件的精密加工.
Cameron 是一家具有40多年历史的美国公司. 产品优质可靠, 性价极优.
·微孔直径小达 0.050 mm (50 um).
·Spindle speed 达 46,000 RPM.
·X, Y, Z travel: 150mm x 100mm x 100mm.
·轴向分辨率 2um. 重复性 4um.
·Rotating axis, precision alignment,
camera, and many other options are available.
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激光微加工
Laser Micro Machining
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应用领域:
MEMS,
LED, photonics, nano technologies. 电子器件,
医疗器件, 航空航天等精密加工.
设备特性:
JPSA is a specialist in UV laser micro
machining.
·Uses excimer laser or DPSS laser with
wavelengths ranging from 157nm to 355nm
for various materials and
geometric features.
·JPSA patent pending laser beam technology.
·Large fiend of view (LFOV).
·Granite optical base and air bearing
work stage provide superior stability
and precision. |
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翻新扩散炉
Refurbished Furnaces
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应用领域:
IC fab, pilot line,
MEMS, solar cell.
设备特性: ProTemp
Products 提供各种型号的翻新 furnaces.
·各种炉型: Diffusion, LPCVD, PECVD.
·各种 OEM furnaces, 包括 ProTemp Sirius,
Tempress, Kokusai, TEL,
ASM, Thermco, 等..
·控制软件升级.
·炉管升级:
·OEM direct replacement,
·HiTemp™ for
up to 1350°C.
·FasTemp™ for
fast heating and cooling.
·优秀的性价比, excellent cost of ownership.
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其他翻新设备
Other Refurbished
equipment |
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赛伦科技与美国的Applied
Analytical Equipment and gSEMI 等公司合作,
提供以下各种设
备的翻新、安装和支持. |
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·扫描电镜、透视电镜、聚焦离子束电镜,Hitachi,FEI,JEOL,Micrion等公司的SEM,TEM,以及FIB.
·晶片器件缺陷检测设备. KLA 2132, 2135, 2138, 5100,
5200 等.
·晶片表面颗粒检测设备. Surfscan 5000,6200,6220,6400,6420,SP1,ATI
等. |
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配件与耗材
Parts & Consumables |
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赛伦科技提供各种配件与耗材.
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·射频电源及直流电源,
Power Supply (new or refurbished)
FR generators
and DC power supplies. ENI, Advanced
Energy, and more.
·全新配件与耗材, Replacement parts and consumables:
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·Applied Materials, LAM, Novellus,
Tegal, TEL 等公司的产品.
·Etch, PECVD, and
Sputter 等设备.
·Electrodes, gas
distribution plates, hex covers, susceptor
plates, rings, 等配件.
·MFC, valves,
gauges 等真空器件. |
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