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    晶片微缺陷检测 Wafer Defects Metrology

    • 型号晶片微缺陷检测 Wafer Defects Metrology
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    晶片微缺陷检测 Wafer Defects Metrology

    1. 详细信息

    应用领域: Wafer manufacturing (Si, GaAs等), IC fab, solar cell, MEMS. 
    设备特性: Automatic defects detection system with on high resolution microscopy. 
    ·Automatic defect detection and classification.
    ·Blank wafers, device patterned wafers, SOI wafers. 
    ·CD measurement. 
    ·In-line or off-line for FPD and think film solar panels.

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