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    薄膜应力 Film Stress and Wafer Bow

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    薄膜应力 Film Stress and Wafer Bow

    1. 详细信息

    应用领域: IC fab, wafer manufacturing, LED, MEMS, photonics. 
    设备特性:Laser scanning technique, fast, accurate, non-invasive. 
    ·Advanced stress measurement system using optilever laser scanning. 
    ·Mapping whole wafer, 3D and 2D display. 
    ·Measures film stress and wafer bow. 
    ·Over 400 systems installed in IC fabs and R&D labs worldwide.

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