§ General Description
§ The Loadstation
§ The Furnace
§ PC-MUX Controller
§ Gas Source Cabinet
§ Scavenger
§ Robotics/Automation
§ Thermco5000 Series
•5000series was developed for 150mm wafer processing
•Up to1016 mm flat zone (5200 model)
•Typically4 tubes per stack
•Normallyconfigured for semi-automatic loading
§ Thermco8000 Series
•8000Series is Thermco’s largest furnace system
•Developedfor 200mm wafers
•Usedin PV production for 156x156mm cells
•Up to5 tubes in one stack
•Canbe configured for full automation
•Up to1100 mm flat zone (8200 model)
