Transfers 24 to 26 wafers between one standard pitch plastic cassette and one custom process boat in a contact back-to-back configuration.
As with all Mactronix wafer transfer systems, the MacLite Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
Machine interface is a 12 key pad with a 4 line LCD Display.
Designed to limit particle contamination by using lead screw drive and stepper motor, “clean room grade” rails and bearings and electric boat sensors.
All aluminum parts are hard black anodized for corrosion resistance.
Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
Lift system uses ramped speed controls for gentle pick-up and landing.
Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.
Machine will not drop wafers in the event of a power failure and will prompt the operator through the “Recovery Mode” after power has been restored.
A “Technician Mode” is provided to facilitate preventative maintenance.
Uptime will exceed 99.25%.
MTBF (mean time between failure): 100,000 wafers
MTBA (mean time between assist): 25,000 wafers
MTTR (mean time to repair): less than 1 hour