75mm thru 150mm (3″ thru 6″): 8.2″ x 12.2″ x 26.3″
200mm (8 inch): 10″ x 14.5″ x 32.5″
NOTE: Optional Extended Platform will add ≈ 6″ to the overall width of the machine.
Options
Extended Platform
Recessed mounting
Vespel package for high temperature applications
Stainless steel covers.
Hot boat sensor
Features & Benefits
The Eureka Junior Series III will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
As with all Mactronix wafer transfer systems, the Eureka Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
With the push of a button, the machine transfers wafers safely and automatically.
The Eureka Series wafer transfer machines have a proven track record and are completely air operated, therefore cost effective. Its simple design eliminates extensive R&M training.
Flat alignment is preserved during transfer.
Pressure sensors are used for both personal safety and machine safety by inhibiting machine operation.
Retainers default to closed position to prevent dropping wafers in the event of an air pressure loss.
Aluminum parts are hard black anodized for corrosion resistance.
Wafer contact is minimized to ensure maximum cleanliness for critical diffusion processes, improving yields and productivity.
