The Horizon Junior Series V will transfer a maximum of 25 wafers between two cassettes, two process boats or one process boat and one cassette.
As with all Mactronix wafer transfer systems, the Horizon Series may be configured to accommodate a wide range of Plastic, Teflon®, Metal, Quartz, Silicon Carbide, and Polysilicon carriers.
PLC controlled enhancing the transfer machine’s simplicity.
With the push of a button, the machine transfers wafers safely and automatically.
The Horizon Series V machines are designed to limit particle contamination by using a stepper motor w/lead screw, “clean room grade” rails and bearings and a 1.25″ non-process exhaust port.
The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
All aluminum parts are hard black anodized for corrosion resistance.
Electronic through beam sensors are used to detect wafer presence in boats and retainers thus preventing accidental double loading and scratches.
Lift system uses ramped speed controls for gentle pick-up and landing.
Pressure sensors are used both for personal safety and to prevent wafer damage by inhibiting machine operation.
Retainers default to closed position to prevent the dropping of wafers in the event of a power disruption or a loss of air pressure or both.
A “Maintenance/Cleaning Mode” is provided to facilitate preventative maintenance.
The Series V machines have been tested with up to 50,000 volts of electrostatic discharge without disruption to internal electronics. The Series V machines are virtually immune to RFI noise, EMF, and ESD.
Uptime will exceed 99.25%.
MTBF (mean time between failure): 2,500 hours
MTBA (mean time between assist): 1,000 hours
MTTR (mean time to repair): 1 hour
PLC controller is equipped with an RS422 communications port.