应用领域: Solar cell, IC, wafer manufacturing, MEMS, LED.
设备特性: WEP is a world leader in ECV dopant profiling.
·Electrochemical CV profiling - 电解液CV (ECV)法检测掺杂-深度曲线.
·ECV 测量活性杂质, 直观简易, 优于 SIMS and SRP.
·ECV 广泛用于各种半导体工艺, Group IV (Si, Ge, SiC), Group II/VI (GaAs, InP …), Group II/VII (CdTe, HgCdTe, ZnO …), Nitrides (GaN, AlGaN …), 及其它化合物半导体 (AlGaAs, GaInP, AlGaInP …)
