HOLOGENIX晶片缺陷快测魔镜 Magic Mirror

应用领域:
Wafer manufacturing (Si, GaAs等), IC fab, MEMS.

设备特性:
Magic Mirror, 测晶片缺陷的经典手段.
· Detect dimple and depressed areas.
· Detect mounds and raised areas.
· Detect slip lines.
· Manual models or high throughput automatic models.