应用领域:
IC fab.
设备特性:
美国NadaTech （原ASYST），全球IC业界广泛应用.
· 4‘,6’, 8’,12‘ wafers.
· wafer sorters for Si/GaAs/Sapphire/SiC suppliers and IDMs.
· bright light inspection.wafer thickness sorters.wafer edge inspection.
thin wafer solutions.ir and visible inspection.
· sorting systems and options for all major semi related industries.
· standard n4x series sorters for open cassette fabs (50mm to 200mm)
· highest reliability industry standard RTZ robotics.
· NADAtech's SUREscan thrubeam carrier mapping.
· RBuilder GUI recipe development tool.
· vacuum backside or edge handling.
· IOSS OCR.
